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Rotary union and alignment in vacuum (F-Drive)
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Rotary union and alignment in vacuum (F-Drive)
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1


F-Drive Aligner


We offer aligners for every substrate shape. They work in both atmosphere and vacuum. Our aligners are equipped with a precise sensor system to detect any features such as notch, flat, edges or corners. In addition, expansion with sensor technology for the detection of IDs is possible. Due to the configurability, we can achieve the best ratio of accuracy to speed according to customer requirements.

Vacuum level 1x10e-7 mbar
Leak rate 1x10e-9 mBar l/s
Payload 1000 g
Centering accuracy 0,1 mm
Turning accuracy 0,7 mrad
Velocities 200 °/s



 



 



 
 

1


F-Drive Aligner




We offer aligners for every substrate shape. They work in both atmosphere and vacuum. Our aligners are equipped with a precise sensor system to detect any features such as notch, flat, edges or corners. In addition, expansion with sensor technology for the detection of IDs is possible. Due to the configurability, we can achieve the best ratio of accuracy to speed according to customer requirements.

Vacuum level 1x10e-7 mbar
Leak rate 1x10e-9 mBar l/s
Payload 1000 g
Centering accuracy 0,1 mm
Turning accuracy 0,7 mrad
Velocities 200 °/s



 



 

 


 




 























 

2


F-Drive
Vacuum feedthrough


With optimum value for money

Vacuum feedthroughs with leak rates < 10-8 mbar l/s are mostly realized with ferrofluidic seals.

For such cases MAFU offers a much more cost efficient solution. Vacuum compatible oil is filled in the gap between two axial shaft seals. This guarantees a very good seal rate as well as a significant lifetime extension.

Leakage standstill 1x10e-9 mbar l/s
Leakage at max. speed 1x10e-8 mbar l/s
Max. speed 100 rpm
Max. torque 25 Nm
Max. moment of tilt 100 Nm
Lifetime 10 km



 



 



 
 

2


F-Drive
Vacuum feedthrough




With optimum value for money

Vacuum feedthroughs with leak rates < 10-8 mbar l/s are mostly realized with ferrofluidic seals.

For such cases MAFU offers a much more cost efficient solution. Vacuum compatible oil is filled in the gap between two axial shaft seals. This guarantees a very good seal rate as well as a significant lifetime extension.

Leakage standstill 1x10e-9 mbar l/s
Leakage at max. speed 1x10e-8 mbar l/s
Max. speed 100 rpm
Max. torque 25 Nm
Max. moment of tilt 100 Nm
Lifetime 10 km



 



 

 


 






I am looking forward to your contact.