We offer aligners for every substrate shape. They work in both atmosphere and vacuum. Our aligners are equipped with a precise sensor system to detect any features such as notch, flat, edges or corners. In addition, expansion with sensor technology for the detection of IDs is possible. Due to the configurability, we can achieve the best ratio of accuracy to speed according to customer requirements.

Facing demanding substrate handling challenges? Our F-Drive, configured as a Flip Station, is the ideal solution. It delivers high positional and repeatability accuracy, making it perfectly suited for individually configurable rotational positioning applications. We adapt the flip process parameters to your specifications — ensuring safe handling of your sensitive substrates while meeting the throughput requirements of your process.

Technical Data

Facing demanding substrate handling challenges? Our F-Drive, configured as an Edge Grip Aligner, is the ideal solution. It delivers high positional and repeatability accuracy, making it perfectly suited for individually configurable rotational positioning applications. We adapt the alignment process parameters to your specifications — ensuring safe handling of your sensitive substrates while meeting the throughput requirements of your process.

Technical Data

With optimum value for money

Vacuum feedthroughs with leak rates < 10-8 mbar l/s are mostly realized with ferrofluidic seals.

For such cases MAFU offers a much more cost efficient solution. Vacuum compatible oil is filled in the gap between two axial shaft seals. This guarantees a very good seal rate as well as a significant lifetime extension.