1


KEY DATA


MAFU Robotics GmbH is a member of the MAFU group and is active in the fields of vacuum handling. But also ulta-clean-handling under clean room conditions is part of our portfolio. The company can benefit from the many years of experience of its sister companies.

 



 



 
 

1


KEY DATA




MAFU Robotics GmbH is a member of the MAFU group and is active in the fields of vacuum handling. But also ulta-clean-handling under clean room conditions is part of our portfolio. The company can benefit from the many years of experience of its sister companies.

 



 






























 
 

2


CORE COMPETENCE


 
 

We take care of your automation tasks in the field of semiconductor manufacturing, MEMS production, analytics and metrology. We enjoy your challenges, if you have special cleanliness requirements or your material has to be transported and provided in special environments such as vacuum or inert gas. Our wide experience in material handling in cleanroom environment, high vacuum (HV) aa well as in ultra high vacuum UHV) will be beneficial for you. We accompany you from concept to acceptance and the start of production and do not leave you alone during operation either.

We are covering all areas. To handle all sizes of wafers into CVD, PVD or etching processes is for us a common task to solve. We have already handled wafers and reticles into EUV processes. Mechanics, mechatronics, electrics and software units are widely available as finished components of a constantly growing modular system. However, we are also prepared to adapt each of these component trades according to your needs. This ranges from material-specific grippers to aligning any substrate, individual pumping station control and software integration into your MES environment. This is often called industry 4.0, which is already standard for us.

 




 



 
 

2


CORE COMPETENCE




We take care of your automation tasks in the field of semiconductor manufacturing, MEMS production, analytics and metrology. We enjoy your challenges, if you have special cleanliness requirements or your material has to be transported and provided in special environments such as vacuum or inert gas. Our wide experience in material handling in cleanroom environment, high vacuum (HV) aa well as in ultra high vacuum UHV) will be beneficial for you. We accompany you from concept to acceptance and the start of production and do not leave you alone during operation either.

We are covering all areas. To handle all sizes of wafers into CVD, PVD or etching processes is for us a common task to solve. We have already handled wafers and reticles into EUV processes. Mechanics, mechatronics, electrics and software units are widely available as finished components of a constantly growing modular system. However, we are also prepared to adapt each of these component trades according to your needs. This ranges from material-specific grippers to aligning any substrate, individual pumping station control and software integration into your MES environment. This is often called industry 4.0, which is already standard for us.

 



 
 


 

3


POLICY


For us, Quality means aligning our products and services with the needs, requirements and expectations of our customers and striving to increase customer satisfaction. We want to achieve this by constantly improving our products and services. The training in our company forms a central cornerstone.

 


 



 
 

3


POLICY




For us, Quality means aligning our products and services with the needs, requirements and expectations of our customers and striving to increase customer satisfaction. We want to achieve this by constantly improving our products and services. The training in our company forms a central cornerstone.

 



 



 
»

We shorten production times and thus increase efficiency for our customers
«
 

Ralph Lehleuter
CEO
+49 (7428) 931-0
info@mafu.de

 














Sustainability is a top priority at all of our locations


MAFU CEO Ralph Lehleuter on the Group's sustainability strategy

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100%

By 2040 at the latest, we want the MAFU group to reach climate neutrality, meaning not leaving any CO₂ footprint at all. This also includes emissions that are produced throughout the supply chain during the manufacture of our products.














0%

By 2035 we will reduce the direct and indirect emissions of the MAFU Group to 0. This also includes those that arise, for example, from the combustion of gas, oil or diesel.


learn more

 















Sustainability is a top priority at all of our locations


MAFU CEO Ralph Lehleuter on the Group's sustainability strategy

learn more














100%

By 2040 at the latest, we want the MAFU group to reach climate neutrality, meaning not leaving any CO₂ footprint at all. This also includes emissions that are produced throughout the supply chain during the manufacture of our products.














0%

By 2035 we will reduce the direct and indirect emissions of the MAFU Group to 0. This also includes those that arise, for example, from the combustion of gas, oil or diesel.


learn more