The MAFU stage positions your samples in high vacuum (HV) and ultra high vacuum (UHV) and also in extreme high vacuum (XHV) in the XY plane, without the need for feedthroughs in your vacuum chamber.
1
Stage M-DRIVE PS 350 A
The MAFU stage positions your samples in high vacuum (HV) and ultra high vacuum (UHV) and also in extreme high vacuum (XHV) in the XY plane, without the need for feedthroughs in your vacuum chamber.
2
UHV-Tunnel
Whether you want to load a single UHV chamber or link several process chambers, the modular M-Drive transport system offers both the simplest and the best technical solution.
2
UHV-Tunnel
Whether you want to load a single UHV chamber or link several process chambers, the modular M-Drive transport system offers both the simplest and the best technical solution.
